Information Package
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Program of Electrical and Electronics Engineering (English 30%)

EEM446

FUNDAMENTALS OF MICRO ELECTROMECHANICAL SYSTEMS (MEMS)

Course Code
EEM446
Semester
-
Theory+Practice
3 + 0
ECTS
5
Course TypeElective Course
Course LevelBachelor's Degree
Year of Study-
Semester-
ECTS5
Name of Lecturer(s)
Learning Outcomes

At the end of this course, the students;

  1. To be able to explain the fundamental theory, design and working principles of Micro/Nano Electromechanical Systems (MEMS/NEMS) and microsystem.
  2. To be able to identify optimal microfabrication, micromachining, packaging techniques and process flow for micro devices and systems; and distinguish the design, fabrication and packaging techniques applicable to microsystems from those for integrated circuits.
  3. To be able to explain the different sensing and actuation methods including electrostatic, magnetic, piezoelectric, piezoresistive, thermal principles relevant to the design and operation of MEMS sensors and actuators.
  4. To understand the relevant engineering science topics relating to MEMS and microsystems, learn the scaling laws for miniaturization and be able to handle mechanical systems engineering design of micro scale devices.
  5. To be familiar with the materials, in particular, silicon and its compounds for MEMS, and be able to identify the optimal materials for an intended application based on the fabrication requirements, material properties, and material compatibilities.
  6. To learn the different application areas of MEMS and the MEMS technology market including RF-MEMS, BIO-MEMS and Optical MEMS (MOEMS).
  7. To learn the fundamentals of nanotechnology, nanofabrication and the interplay between MEMS and nanoscience.
Mode of DeliveryFace to face
PrerequisitesNo
Recommended Optional Programme ComponentsNone.
Course DescriptionThis course introduces students to the multi-disciplinary, and existing field of microelectromechanical systems (MEMS). Topics covered in this course include scaling laws involved in MEMS, the theory and principles of major sensing/actuation mechanisms (including electrostatic, piezoelectric, thermal, piezoresistive, electromagnetic) and electromechanical concepts which are relevant for the design of MEMS devices, micro sensors and actuators. The course will teach the basic design principles for MEMS and micro/nano scale devices, will discuss the important application areas of MEMS (automative, defence, aerospace, microfluidics, biotech, medical, etc.) and nanotechnology; as well as, the fundamental principles of microfabrication and micromachining techniques for micro/nano devices and systems.
Course Contents
WEEK TOPICS
1st Week Introduction to MEMS and microsystems, history and trends
2nd Week Working principles and application areas of MEMS and microsystems
3rd Week Overview of microfabrication technology, MEMS process flow
4th Week Patterning technologies, MEMS layout
5th Week Electro mechanical concepts for microsystem design
6th Week Capacitive Sensors and Actuators
7th Week Thermal Sensing and Actuation
8th Week Midterm Exam
9th Week Piezoresistive & Piezoelectric Sensing and Actuation
10th Week Magnetic Sensing and Actuation
11th Week Silicon bulk micromachining
12th Week Surface micromachining, materials selection for MEMS
13th Week Polymer MEMS and Microfluidics
14th Week MEMS Integration, Packaging, Cleanroom laboratory tour
Recommended or Required Reading1) Foundations of MEMS, Chang Liu
2) Microsystem Design, Stephen D. Senturia
3) Fundamental of Microfabrication, Marc Madou
4) An Introduction to Microelectromechanical Systems Engineering, Nadim Maluf
5) MEMS Handbook, Mohamed Gad-el-Hak
6) Micromachined Transducers Sourcebook, G. Kovacs
7) Microchip Fabrication, Peter van Zant.
Planned Learning Activities and Teaching Methods
  • Lecture
  • Questions/Answers
  • Practice
Assessment Methods and Criteria
Quantity Percentage (%)
Mid-term 1 30
Assignment 3 30
Total(%) 60
Contribution of In-term Studies to Overall Grade(%) 60
Contribution of Final Examination to Overall Grade(%) 40
Total(%) 100
ECTS Allocated Based on Student Workload
Activities Quantity Duration (Hour) Total Workload (Hour)
Midterm exam 1 2 2
Preparation for Quiz 0 0 0
Individual or group work 14 3 42
Preparation for Final exam 1 20 20
Course hours 14 3 42
Preparation for Midterm exam 1 10 10
Laboratory (including preparation) 0 0 0
Final exam 1 2 2
Homework 3 3 9
Total Work Load127
Total Work Load / 30 (h)4.23
ECTS Credit of the Course5
Language of InstructionEnglish
Work Placement(s)No

Programme Qualifications / Learning Outcomes

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K5 X X
K6 X
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