| Course Type | Elective Course |
|---|
| Course Level | Master's Degree Without Thesis |
|---|
| Year of Study | - |
|---|
| Semester | - |
|---|
| ECTS | 10 |
|---|
| Name of Lecturer(s) |
- |
| Learning Outcomes |
At the end of this course, the students;
- Recognizing the importance of MEM systems.
- Being able to generate coupled system of equations in MEM systems.
- Analyzing MEM systems with beam and plate theories.
- Learning the fundamentals of electrodynamics.
- Apprehending the today and future application areas of the MEM systems.
|
| Mode of Delivery | Face to face |
|---|
| Prerequisites | No |
|---|
| Recommended Optional Programme Components | None |
|---|
| Course Description | MEM materials, micro mechanic processes, MEM structures and systems, industrial, photonic and RF applications, packaging and safety. |
|---|
| Course Contents |
| WEEK |
TOPICS |
|
1st Week |
Course overview, non-dimensionalization, and single degree of freedom systems |
|
2nd Week |
Elastic MEMS and kinematics of continua |
|
3rd Week |
Equilibrium equations, constitutive equations in linear elasticity, and Navier's equations |
|
4th Week |
Strings and membranes |
|
5th Week |
Beam theory |
|
6th Week |
Variational calculus: Lagrange equations and an alternative way to look at strings, membranes, and plates |
|
7th Week |
Midterm |
|
8th Week |
Plate theory |
|
9th Week |
Plate problems |
|
10th Week |
Fundamentals of electrodynamics and small is different |
|
11th Week |
Analysis of single degree of freedom models for electrostatically actuated MEMS |
|
12th Week |
Modeling electro statically actuated micro membranes |
|
13th Week |
Modeling and numerical analysis of electro statically actuated micro beams and |
|
14th Week |
micro plates |
|
15th Week |
Final Exam |
|
| Recommended or Required Reading | Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition (Nano- and Microscience, Engineering, Technology, and Medicine Series)
An Introduction to Microelectromechanical Systems Engineering, Second Edition by Nadim Maluf and Kirt Williams
|
|---|
| Planned Learning Activities and Teaching Methods |
|
|---|
| Assessment Methods and Criteria |
|
Quantity |
Percentage (%) |
| Mid-term |
1 |
30 |
| Assignment |
5 |
20 |
| Total(%) |
|
50 |
| Contribution of In-term Studies to Overall Grade(%) |
|
50 |
| Contribution of Final Examination to Overall Grade(%) |
|
50 |
| Total(%) |
|
100 |
|
| ECTS Allocated Based on Student Workload |
| Activities |
Quantity |
Duration (Hour) |
Total Workload (Hour) |
| Midterm exam |
1 |
3 |
3 |
| Preparation for Quiz |
|
|
|
| Individual or group work |
14 |
3 |
42 |
| Preparation for Final exam |
1 |
50 |
50 |
| Course hours |
14 |
3 |
42 |
| Preparation for Midterm exam |
1 |
30 |
30 |
| Laboratory (including preparation) |
|
|
|
| Final exam |
1 |
3 |
3 |
| Homework |
5 |
25 |
125 |
| Total Work Load | 295 |
| Total Work Load / 30 (h) | 9.83 |
| ECTS Credit of the Course | 10 |
|
| Language of Instruction | Turkish |
|---|
| Work Placement(s) | No |
|---|
